Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology by Saburo Nonogaki & Takumi Ueno & Toshio Ito

Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials.
`Author(s) :`	`Format :` Hardback Book
`ISBN-10 :` 0824799518	`ISBN-13 :` 9780824799519
`RRP :` £97.00	`Best available price :` £ / $
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Product Details:

Series Title : Plastics engineering

Country Publication : United States

Publication Date : 25/06/1998

Publisher : Taylor & Francis Ltd

Page Length : 336mm

Page Size : 241mm